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    • 专利摘要:
    A light coupling structure (106) comprising a diffraction grating coupler (112) that is configured to optically couple to an optical element (102). The diffraction grating coupler (112) has a diffraction grating (126) that extends parallel to a diffraction grating plane (122). The diffraction grating coupler (112) is configured to diffract a light beam into first and second diffracted portions (202, 204) when the light beam is indeed normal to the plane of the diffraction grating (122). The first and second diffracted portions (202, 204) propagate away from each other. The light coupling structure (106) also includes first and second intermediate waveguides (114, 116) that are optically coupled to the diffraction grating coupler (1 12) and configured to receive the first and second diffracted portions respectively (202, 204). The light coupling structure (106) also includes a common waveguide (132) which is coupled to the first and second intermediate waveguides (114, 116) at a junction of the waveguide (130). The first and second diffracted portions (202, 204) propagate in the first and second intermediate waveguides (114, 116) respectively and are phase combined at the junction of the waveguide (130).
    公开号:FR3027689A1
    申请号:FR1559923
    申请日:2015-10-19
    公开日:2016-04-29
    发明作者:Tao Ling；Jonathan Lee
    申请人:Tyco Electronics Corp；
    IPC主号:
    专利说明:

    [0001] LUMINOUS COUPLING STRUCTURE AND OPTICAL DEVICE COMPRISING A BACKGROUND NETWORK COUPLER The subject matter generally relates to an optical device that is configured to optically couple to another element, such as an optical fiber or a laser, via a coupler diffraction grating. More and more industries have recently started using optical devices and, in particular, optical devices developed by silicon-based photonics. Photonic integrated circuits, ie Photonic Integrated Circuit (PIC), can for example be used in various applications in the fields of communications, instrumentation and optical signal processing. A PIC may use submicron waveguides to interconnect various on-chip components, such as optical switches, couplers, routers, splitters, multiplexers / demultiplexers, modulators, amplifiers, wavelength converters , optical-to-electrical signal converters, and electrical-to-optical signal converters. An advantage of PIC systems is their potential for large scale manufacturing and integration through known semiconductor manufacturing techniques (eg, complementary metal oxide semiconductor technology, Complementary Metal-Oxide-Semiconductor (CMOS) )). A PIC may be optically coupled to an optical fiber or an external light source such that the PIC may receive light from the optical fiber or light source and / or direct light into the optical fiber . However, it may be complicated to optically couple the optical fiber and the PIC efficiently, especially with a yield greater than 50 ° A. For example, the optical fiber has a much larger cross-sectional area than the cross-sectional area of the PIC submicron waveguide. The cross-sectional area of the mode field must therefore be significantly reduced as light passes from the optical fiber to the PIC or vice versa. The two most common light coupling solutions are in-plane coupling and off-plane coupling. The in-plane coupling, which may also be referred to as an edge coupling or a tip coupling, includes orienting the optical fiber such that an end of the optical fiber is aligned with a central axis of the optical fiber guide. wave. In other words, the end of the optical fiber is "in the plane" of the waveguide. Although in-plane coupling can be effective and effectively reduce the diameter of the mode field, ICPs that use in-plane coupling can be difficult to fabricate, package, and test in quality control.
    [0002] In off-plane coupling, the optical fiber is not aligned with the central axis or plane of the waveguide. The axis of the optical fiber is however substantially normal to the plane of the waveguide. Off-plane coupling can be accomplished via diffraction grating couplers. A diffraction grating coupler comprises a planar diffraction grating having an orientation substantially normal to the axis of the optical fiber. The diffraction grating is configured to scatter the light so as to propagate it in the desired direction (i.e., in the PIC waveguide or in the optical fiber). Diffraction grating couplers are generally more tolerant to misalignment and are less complex to condition. For some applications at least, CIPs that include diffraction grating couplers are, however, less effective than CIPs that include in-plane coupling. In addition, the alignment of the PIC and the optical fiber can still be complex. For example, it is often necessary to orient the optical fiber so that it is not perfectly normal to the diffraction grating. For example, the optical fiber is typically positioned between about 9.0 ° and about 12.0 ° to normal. For some applications, it may be difficult to position the optical fiber reliably in this orientation. Accordingly, there is a need for a light coupling structure having a diffraction grating coupler capable of coupling to a light beam which is effectively normal to the diffraction grating coupler. BRIEF DESCRIPTION In one embodiment, a light coupling structure is provided. The light coupling structure comprises a diffraction grating coupler that is configured to optically couple to an optical element. The diffraction grating coupler comprises a diffraction grating which extends parallel to a diffraction grating plane. The diffraction grating coupler is configured to diffract a light beam into first and second diffracted portions when the light beam is directed from the optical element to the diffraction grating coupler and is indeed normal to the plane of the diffraction grating. The first and second diffracted portions propagate away from one another. The light coupling structure also includes first and second intermediate waveguides that are optically coupled to the diffraction grating coupler and configured to respectively receive the first and second diffracted portions from the diffraction grating coupler. The light coupling structure also includes a common waveguide which is coupled to the first and second intermediate waveguides at a junction of the waveguide. The first and second diffracted portions propagate respectively in the first and second intermediate waveguides and are combined in phase at the junction of the waveguide. In some embodiments, the light beam is indeed normal to the plane of the diffraction grating when the angle between the light beam and the normal to the plane of the diffraction grating does not exceed about 6.0 °, and in particular 5.00 . In some embodiments, the first and second waveguides are formed from a waveguide layer. The waveguide layer also forms a light coupling portion that extends along the diffraction grating. The diffraction grating is configured to direct the first and second diffracted portions in the light coupling portion. The first and second diffracted portions propagate in opposite directions in the light coupling portion. Optionally, the diffraction grating coupler comprises a coating layer that extends along the waveguide layer. The diffraction grating may be integrated into the coating layer such that a portion of the coating layer extends between the diffraction grating and the waveguide layer. Optionally, the diffraction grating is separated from the waveguide layer by a coating underlayer. In some embodiments, the diffraction grating has a diffraction grating period that is less than the wavelength of the light beam. The diffraction grating may for example have a diffraction grating period that is less than 1000 nanometers. In some embodiments, the first and second intermediate waveguides have equal path lengths between the diffraction grating coupler and the waveguide junction. In some embodiments, the diffraction grating coupler, the first and second intermediate waveguides, and the common waveguide are formed via at least one of silicon-on-insulator (Silicon On Insulator) processes. SOI), and a complementary metal oxide semiconductor process (CIVIOS).
    [0003] In some embodiments, the light coupling structure further comprises a device waveguide having a reciprocating portion that is optically coupled to the common waveguide. In some embodiments, the junction of the waveguide is a Y-junction. In some embodiments, the first and second intermediate waveguides respectively comprise first and second conical segments which respectively receive the first and second portions. diffracted, the first and second conical segments being reduced in size as the first and second conical segments extend away from the diffraction grating coupler. In one embodiment there is provided an optical device comprising a diffraction grating coupler which is configured to optically couple to an optical element. The diffraction grating coupler comprises a diffraction grating which extends parallel to a diffraction grating plane. The diffraction grating coupler is configured to diffract a light beam into first and second diffracted portions when the light beam is directed from the optical element to the diffraction grating coupler and is indeed normal to the plane of the diffraction grating. The first and second diffracted portions propagate away from one another. The optical device also includes first and second intermediate waveguides that are optically coupled to the diffraction grating coupler and configured to receive the first and second diffracted portions respectively from the diffraction grating coupler. The optical device also includes a common waveguide that is coupled to the first and second intermediate waveguides at a junction of the waveguide. The first and second diffracted portions propagate respectively in the first and second intermediate waveguides and are combined in phase at the junction of the waveguide to form a guided portion. The optical device further comprises an optical circuit that is optically coupled to the common waveguide. The optical circuit is configured to process the guided portion in a designated manner. In some embodiments, the light beam is indeed normal to the plane of the diffraction grating when the angle between the light beam and the diffraction grating normal does not exceed about 6.0 °. In some embodiments, the first and second intermediate waveguides are formed from a waveguide layer, the waveguide layer also forming a light coupling portion extending along the waveguide layer. of the diffraction grating, the diffraction grating being configured to direct the first and second diffracted portions in the light coupling portion, the first and second diffracted portions propagating in opposite directions in the light coupling portion. In some embodiments, the diffraction grating coupler includes a coating layer that extends along the waveguide layer, the diffraction grating being integrated into the coating layer such that a portion the coating layer extends between the diffraction grating and the waveguide layer. In some embodiments, the diffraction grating is separated from the waveguide layer by a coating underlayer. In some embodiments, the first and second intermediate waveguides have symmetrical paths between the diffraction grating coupler and the waveguide junction. The optical device is optionally a photonic integrated circuit. The optical circuit optionally comprises a modulator. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic illustration of an optical device formed in accordance with an embodiment which is optically configured to mate with an out-of-plane optical element. Fig. 2 is a schematic illustration of a light coupling structure of the optical device of Fig. 1 which can couple to the out-of-plane optical element.
    [0004] FIG. 3 illustrates a side view of a diffraction grating coupler that may be used with the light coupling structure of FIG. 2. FIG. 4 is an isolated view of a coupling transition region of the grating structure of FIG. Figure 5 illustrates a cross-section of the coupling transition region. DETAILED DESCRIPTION Figure 1 is a schematic illustration of an optical device 100 formed in accordance with one embodiment. The optical device 100 may be configured to receive light (or light signals), process or modulate the light in a designated manner, and then emit the processed or modulated light. The light may correspond, for example, to optical data signals. In an exemplary embodiment, the optical device 100 is a photonic integrated circuit (PIC) used to communicate and / or process the optical signals. It should be understood, however, that the optical device 100 may be used in other applications. The optical device 100 may for example be a sensor comprising a sample that modulates the light signals and / or emits light signals based on properties of the sample. In some embodiments, the optical device 100 is an integrated device that includes a silicon photonic chip. At least a portion of the optical device 100 may be fabricated according to processes used to fabricate semiconductors. The optical device 100 may for example be manufactured according to processes for producing CMOS semiconductor devices and / or SOI silicon on insulator devices. In particular embodiments, the optical device 100 is entirely manufactured according to CMOS or SOI processes. The optical device 100 may be incorporated into a larger system or device.
    [0005] As shown in Fig. 1, the optical device 100 is configured to optically couple a first optical element 102 to a second optical element 104. The optical device 100 may be bidirectional in some embodiments. Accordingly, although the following detailed description may use directional terms when detailing the propagation of light, it should be understood that in some embodiments, light may propagate in the opposite direction. In the illustrated embodiment, the first and second optical elements 102, 104 are optical fibers that can provide light to the optical device 100 and / or receive light therefrom. In other embodiments, however, the first and second optical elements 102, 104 may be other types of optical elements that are capable of at least providing or receiving light. One or other of the optical elements 102, 104 may be for example a light source or a light receiver. In some embodiments, a light source may include, for example, an optical fiber, a vertical cavity laser diode emitting a polarization-controlled VCSEL (Vertical-Cavity Surface-Emitting Laser) surface, and / or a distributed feedback laser. DFB (Distributed Feedback Laser).
    [0006] The optical device 100 comprises a first light-coupling structure 106 which is optically coupled to an optical circuit 108 and / or a second light-coupling structure 110. The second light-coupling structure 110 is optically coupled to the second optical element 104 The optical circuit 108 and the light coupling structure 110 are generally illustrated in Figure 1, and it should be understood that various optical circuits and / or light coupling structures may be used. The light coupling structure 110 may for example be similar or identical to the light coupling structure 106. The optical circuit 108 may be configured to process the light (or light signals) that propagate through the optical device 100 of predetermined manner. Applications for optical device 100 or optical circuit 108 include, but are not limited to, optical switches, couplers, routers, splitters, modulators, amplifiers, multiplexers / demultiplexers, length converters waveforms, and optical-electrical or electrical-optical signal converters. In other embodiments, the optical circuit 108 may be part of a sensor that is configured to detect one or more properties of an environment or a sample.
    [0007] In one exemplary embodiment, the light coupling structure 106 is an input coupling structure that receives a light beam 120 from the first optical element 102, and the light coupling structure 110 is a light-coupled structure. An output that provides the modulated light to the second optical element 104. In some embodiments, however, the optical device 100 may be configured to propagate light in the opposite direction, from the light coupling structure 110 to the light coupling structure. 106. The light coupling structure 106 comprises a diffraction grating coupler 112 and first and second intermediate waveguides 114, 116. The diffraction grating coupler 112 is optically coupled to the optical element 102 such that that the light beam 120 received from the optical element 102 is separated into first and second diffracted portions which are in first and second opposite directions (represented by the arrows 115, 117). The diffraction grating coupler 112 can thus be described as a one-dimensional diffraction grating coupler (1D). The first and second diffracted portions of the light beam 120 are respectively directed into the first and second intermediate waveguides 114, 116. The first and second diffracted portions are transmitted in accordance with the respective first and second intermediate waveguides 114, 116 and 116. joined or recoupled in a junction of the waveguide 130 or in an optical combiner (for example in a multimode interference structure). The junction of the waveguide 130 is configured to join the first and second phase-diffracted portions such that the first and second diffracted portions form a combined light in a common waveguide 132. The first and second diffracted portions are designated as a guided portion or a combined portion. The guided portion may then propagate along the common waveguide 132 to a coupling transition region 134. The coupling transition region 134 includes a device waveguide 136 that directs the guided portion to the circuit. optical 108.
    [0008] As described herein, the light coupling structure 106 is configured to receive the light beam 120 from the first optical element 102. Unlike the conventional diffraction grating couplers, the light beam 120 can be effectively normal or perpendicular to a plane of light. diffraction grating 122 at an angle to the normal axis 124 which does not exceed 6.0 °. The plane of the diffraction grating 122 may represent a plane which extends parallel to one or more layers of the light coupling structure 106. The diffraction grating coupler 112 comprises, for example, a diffraction grating 126 having a variation or refractive index modulation which extends parallel to the plane of the diffraction grating 122. The variation of the refractive index may be entirely periodic or comprise a plurality of portions which vary at different frequencies. FIG. 1 illustrates the plane of the diffraction grating 122 with respect to the normal axis 124. The light beam 120 emitted by the optical element 102 and / or the light received from the optical element 102 can be propagated along a light propagation axis 128. In some embodiments, the light propagation axis 128 may coincide with the central axis of the end of an optical fiber. As a reference, the light propagation axis 128 is shown extending through the center of the optical element 102. The optical element 102 and / or the optical device 100 are positioned so that the axis In other words, the light propagation axis 128 may extend effectively parallel to the normal axis 124. Due to the tolerances of manufacture of the optical device 100 and / or the optical element 102, it may be difficult to position the optical element 102 so that the light propagation axis 128 is perfectly normal to the diffraction grating coupler 112 or to the plane of the light. diffraction grating 122. The embodiments presented here orient the light coupling structure 106 and / or the optical element 102 relative to each other so that the light propagation axis 128 is indeed normal to the diffraction grating coupler 112 or to the plane of the diffraction grating 122. The present embodiments may be "actually normal" if the light propagation axis 128 is far from the perfect normal of 6.0 ° or less by relative to the diffraction grating coupler 112 or the plane of the diffraction grating 122. In particular embodiments, the light propagation axis 128 is indeed normal if the light propagation axis 128 is far from the perfect normal of 5.0 ° or less, 4.0 ° or less, or 3.0 ° or less with respect to the diffraction grating coupler 112 or the plane of the diffraction grating 122. In more specific embodiments, the light propagation axis 128 may be far from the perfect normal of 2.5 ° or less, 2.00 or less, 1.5 ° or less, 1.0 ° or less, or 0, 5 ° or less with respect to the diffraction grating coupler 112 or the plane of the diffraction grating 122. The cone formed with respect to the normal axis 124 and the plane of the diffraction grating 122 may represent the permitted tolerances of the light propagation axis 128.
    [0009] The embodiments presented herein may be different from conventional light coupling structures that intentionally tilt an optical fiber relative to the normal axis of the diffraction grating coupler. Conventional light coupling structures incline the light propagation axis with respect to the normal axis of 90 or less, to increase, inter alia, the efficiency of the coupling. Despite the fact that the light propagation axis 128 is indeed normal to the diffraction grating coupler 112 or to the plane of the diffraction grating 122, some embodiments may be able to achieve a reasonable coupling efficiency. In some embodiments, for example, the coupling efficiency between the optical element 102 and the diffraction grating coupler 112 and / or the optical device 100 may be at least 50% when the light propagation axis 128 is actually normal to the plane of the diffraction grating 122. In particular embodiments, the coupling efficiency can be at least 60% or at least 70%. In more particular embodiments, the coupling efficiency can be at least 75% or at least 80%. In some embodiments, the optical device 100 and / or the light coupling structure 106 includes a plurality of substrate layers that are stacked on each other. The light coupling structure 106 may for example include a series of substrate layers having different refractive indices that are configured to control light, as described herein. For example, the substrate layers may include one or more layers of silicon oxide, one or more layers of silicon nitride, one or more layers of silicon oxynitride (SiON), one or more layers of silicon oxide, silicon-enriched oxide, one or more layers of silicon substrate, and one or more buried oxide layers. As described herein, the optical device 100 and / or the light coupling structure 106 may be fabricated according to semiconductor manufacturing processes. The substrate layers may for example be provided according to processes that are used in CMOS and / or SOI technologies. Fig. 2 is an enlarged view of the light coupling structure 106 formed in accordance with one embodiment. As shown, the diffraction grating coupler 112 comprises the diffraction grating 126 and a separation or coating layer 171. The diffraction grating 126 is optionally integrated into the coating layer 171. The light-coupling structure 106 also comprises a waveguide layer 172 which is positioned adjacent to the diffraction grating coupler 112. The waveguide layer 172 is configured to receive light from the diffraction grating coupler 112 and / or to provide light. light to this one. In the illustrated embodiment, at least a portion of the coating layer 171 forms an interface with the waveguide layer 172 and separates the diffraction grating 126 from the waveguide layer 172. In some embodiments, In that embodiment, the coating layer 171 may also be part of the diffraction grating 126. In the illustrated embodiment, the waveguide layer 172 is shaped to include a light coupling portion 146 and the first and second waveguide guides. Intermediate waves 114, 116. The light coupling portion 146 is stacked with respect to the cladding layer 171 and the diffraction grating 126. The first and second intermediate waveguides 114, 116 are coupled to either sides or ends. 150, 1.52 of the light coupling portion 146 or the diffraction grating coupler 112. The light coupling portion 146 may optionally have a surface which is at least equal to the diffraction grating coupler 112. The diffraction grating coupler 112 extends for example according to a first dimension 180 and a second dimension 182. The first and second dimensions 180, 182 are perpendicular to one another and may define a surface of the diffraction grating coupler 112. As described above, when the light beam 120 (FIG. 1) is incident on the diffraction grating 126, the diffraction grating 126 can divide the light beam 120 into first and second portions diffracted which propagate in first and second opposite directions 115, 117. The first and second intermediate waveguides 114, 116 respectively comprise first and second mode conversion segments 154, 156 and respectively first and second path segments 158, 160. The first and second mode converting segments 154, 156 are configured to reduce the area in stroke. Cross-section of the waveguide layer 172 of a size comparable to the size of the beam spot or the diffraction grating coupler 112 to a size equal to the cross-sectional areas of the first and second path segments 158, 160 The first and second path segments 158, 160 may have submicron cross-sectional dimensions. In the illustrated embodiment, the first and second mode conversion segments 154, 156 are adiabatically conical in the plane. Each of the first and second path segments 158, 160 has a designated length which is measured from the corresponding mode conversion segment to the junction of the waveguide 130. The first and second path segments 158, 160 may also be have a designated path shape or contour. The first and second path segments 158, 160, for example, have a substantially S-shape. In an exemplary embodiment, the lengths of the first and second path segments 158, 160 are effectively equal, and the first and second segments of path 158, 160 may have identical shapes. As a result, the first and second path segments 158, 160 may be effectively symmetrical with respect to a plane 161 extending between the junction of the waveguide 130 and a center of the diffraction grating coupler 112. The plane 161 may extend parallel to the normal axis 124 (FIG. 1) and perpendicular to the diffraction grating coupler 112. In other embodiments, however, the lengths and / or shapes of the path segments 158, 160 may be different so that the diffracted portions of the light are in phase when combined through the junction of the waveguide 130. As shown, the junction of the waveguide 130 may be a Y-junction. first and second path segments 158, 160 may extend into the junction of the waveguide 130 at an angle 162. The angle 162 may for example be less than 20 °. The first and second path segments 158, 160 may combine to form the common waveguide 132. The common waveguide 132 may have a cross-sectional area that is similar or identical to the first and second path segments 158 , 160 of the first and second intermediate waveguides 114, 116. Figure 3 is a side view of a portion of the light coupling structure 106 which includes the diffraction grating coupler 112. The optical device 100 (FIG. 1) and / or the light coupling structure 106 may be formed by a plurality of stacked substrate layers 171-174. Each of the substrate layers 171-174 may engage or couple with one or two adjacent substrate layers along corresponding interfaces. In the illustrated embodiment, the light coupling structure 106 comprises the coating layer 171, the diffraction grating 126, the waveguide layer 172, a coating layer 173 and a base layer 174. The layers substrate 171-174 are formed of materials having refractive indices that allow or allow light to propagate through the light coupling structure 106 as described herein. By way of example, the coating layer 171 may comprise silicon oxide, the waveguide layer 172 may comprise silicon nitride, the coating layer 173 may comprise silicon oxide, and the base layer 174 may comprise silicon. The substrate layers 171-174 may respectively have refractive indices of approximately 1.45; 2.0; 1.45; and 3.5. The differences in refractive index are configured to direct the propagation light along the waveguide layer 172.
    [0010] Each of the substrate layers 171-174 may include a single layer or a plurality of sublayers. The covering layer 171 may include, for example, a first underlayer 176 that extends between the diffraction grating 126 and the waveguide layer 172, and a second underlayer 177 which is formed on the along the diffraction grating 126. After the formation of the first underlayer lining 176 for example, the second lining sub-layer 177 and the diffraction grating 126 may be subsequently formed over the first underlayer 176. The first underlayer 176 may have a refractive index lower than the refractive index of the waveguide layer 172 or the refractive index of the material of the diffraction grating 179. The second underlayer 177 may include a single layer or a plurality of sub-layers. The diffraction grating 126 may be formed in different ways before, after or simultaneously with the first sub-layer 176 and / or the second sub-layer 177. The diffraction grating 126 may for example be written, embossed, integrated, printed, etched, developed, deposited or otherwise formed in the light coupling structure 106. As shown in FIG. 3, the diffraction grating 126 is integrated in the coating layer 171. The diffraction grating 126 comprises a designated variation of the refractive index which causes the incoming light beam 120 to couple to the waveguide layer 172 as described herein. In the illustrated embodiment, the variation of the refractive index is caused by different alternating materials successively. More specifically, the diffraction grating 126 comprises alternating portions of the coating layer 171 and a material of the diffraction grating 179. The material of the diffraction grating 179 forms a series of ribs 184 which are separated by intermediate portions of In an exemplary embodiment, the material of the diffraction grating 179 comprises amorphous silicon or silicon which is deposited and / or etched so that the ribs 184 are separated by portions. However, it should be understood that the diffraction grating 126 may include other materials and may be formed according to various processes. The series of spaced ribs 184 of the diffraction grating 126 may be co-planar with each other. The ribs 184 may optionally have square or rectangular cross sections. Each rib 184 may, for example, have a height (or depth) 186 and a width (or duty ratio) 188. Adjacent ribs 184 are separated by a gap or gap 190. Width 188 and gap 190 may determine period (or not) 192 of the diffraction grating 126. The period 192 may be uniform for the entirety of the first dimension 180. In alternative embodiments, the period 192 may vary over predetermined portions along the first dimension 180. dimension 180 to achieve the desired effect. The height 186, the width 188, the gaps 190, and the diffraction grating material 126 include at least some parameters that can be configured for the diffraction grating coupler 112 to function as desired. In particular embodiments, the period 192 of the diffraction grating 126 is smaller than the wavelength of the light beam 120. The period 192 of the diffraction grating 126 can be determined by the coupling equation of the diffraction grating: A Nef! In which A is the period 192, A is the wavelength of the incoming light, Aleff is the effective index of the guided mode in the waveguide layer 172 as well as in the diffraction grating 126. is the refractive index of the second coating layer 177, and 0 is the incident angle of the incoming light with respect to the normal axis. In some embodiments, the incident angle 6 may be effectively zero, so that the equation becomes: Period 192 can be computed by responding to a phase matching condition with respect to the Waveguide 172. The diffraction grating 126 may be characterized by having a subwavelength diffraction grating period. The light beam 120 may have one or more wavelengths in a predetermined range. The wavelength or wavelengths of the light beam 120 may for example be between 800 nm (nanometers) and 1600 nm. Wavelengths commonly used in the industry may include 850 nm, 1310 nm and 1550 nm. In particular embodiments, period 192 may be configured to reduce the efficiency or power of the second diffraction order. Period 192 may be less than the wavelength of the light beam or the incident light. The period 192 may for example be less than 1250 nm, less than 1125 nm, less than 1000 nm, less than 900 nm or less than 850 nm. In particular embodiments, the period 192 may be less than 800 nm, less than 775 nm or less than 750 nm. In more particular embodiments, the period 192 may be less than 725 nm or less than 700 nm. The period 192 may be based on other parameters of the diffraction grating 126, such as the refractive indices of the different materials that form the diffraction grating 126.
    [0011] To illustrate the values that can be used in the embodiments described herein, the height 186 may be about 250 nm, the width 188 may be about 300 nm, the refractive index of the ribs 184 may be about 3.5, the refractive index of the material of the coating layer 171 that extends between the ribs 184 may be about 1.45, and the period 192 may be about 755 nm. The wavelength of the light may be about 1310 nm. The above values and other values noted here are, however, provided only to illustrate examples of values that may be used by one or more embodiments, and it should be understood that other values may be used depending on the circumstances and / or the desired application.
    [0012] The diffraction grating 126 is configured such that the effectively normal light beam 120 is diffracted by the diffraction grating 126 to form first and second diffracted portions 202, 204. The first and second diffracted portions 202, 204 are directed to the first and second diffracted portions 202, 204. waveguide layer 172 at an angle that allows the first and second diffracted portions 202, 204 to couple to the waveguide layer 172.
    [0013] As shown in FIG. 3, the diffraction grating 126 is separated from the waveguide layer 172 by the functional thickness 194 of a portion of the cladding layer 171, which may be equal to the height or thickness. The thickness of the first sub-layer 176. The functional thickness 194 may be configured to provide a designated power or coupling efficiency. More specifically, the functional thickness 194 may be configured such that the first and second diffracted portions 202, 204 of the light beam 120 are coupled in the waveguide layer 172 with a designated output. The functional thickness 194 may for example be between about 100 nm and about 250 nm. Upon entering the layer of the waveguide 172, the first and second diffracted portions 202, 204 are effectively directed respectively in the first and second opposite directions 115, 117, and respectively in the first and second waveguides intermediates 114, 116 (Figure 1). The light beam 120 may be configured such that the light beam 120 comprises only a polarization, are in transverse electric mode TE (Transverse Electric) or in transverse magnetic mode TM (Transverse Magnetic). In an exemplary embodiment, the optical device 100 (FIG. 1) does not include an additional optical element positioned between the optical element 102 and the optical device 100. More specifically, a void space may exist between one end of the optical element 102 and an outer or outer surface 196 of the light coupling structure 106. In such embodiments, the light beam 120 may emerge from the optical element 102 in a direction that is actually normal to the plane of the network. diffraction 122 (Figure 1). The plane of the diffraction grating 122 may extend parallel to the substrate layers 171-174 and / or the diffraction grating 126. In other embodiments, the light beam 120 may be redirected before entering the structure A wedge-shaped element (not shown) may for example be positioned between the optical element 102 and the outer surface 196 of the coating layer 171. Although FIG. 3 illustrates an example of a diffraction grating that can be used by the embodiments described herein, it should be understood that the diffraction grating coupler 112 can be modified or changed in one or more ways and achieve the desired effect. One or more of the parameters described above can for example be modified.
    [0014] Similarly, the diffraction grating 126 may be a variable pitch grating or a scaled grating. In some embodiments, a reflecting mirror that facilitates orientation of the first and second diffracted portions 202, 204 may be provided in the light coupling structure 106. Figure 4 is an isolated view of the coupling transition region 134 and Fig. 5 illustrates a cross-section of the coupling transition region 134. The coupling transition region 134 is configured to optically couple the light coupling structure 106 (Fig. 1) to a remaining portion of the optical device 100. The remaining portion of the optical device 100 may for example include the base layer 174, which may be a silicon substrate. The base layer 174 may include one or more of the optical circuits 108 (Fig. 1), mounted thereon, which are optically coupled to the device waveguide 136. As shown in Figs. 4 and 5, the coupling transition region 134 includes an end portion 206 of the common waveguide 132. The common waveguide 132 may be formed from the waveguide layer 172 (FIG. 2). The common waveguide 132 is surrounded by the cladding layer 171. In some embodiments, the cladding layer 171 may completely surround the waveguide layer 172. More specifically, the cladding layer 171 may surround the cladding layer 171. first and second intermediate waveguides 114, 116 (Figure 1) and the light coupling portion 146 (Figure 2). The coupling transition region 134 also includes a tapered portion 210 of the device waveguide 136. The tapered portion 210 is positioned adjacent the terminal portion 206 of the common waveguide 132, and extends parallel to the common waveguide 132. The inverted cone portion 210 and the end portion 206 are positioned and formed relative to each other so that the guided portion of the light is directed into the inverse conicity 210. As shown for example in FIG. 5, the inverted cone portion 210 of the device waveguide 136 may have a width smaller than the width of the common waveguide 132. Comparing FIGS. 5, the width of the reciprocating portion 210 may gradually become larger than the width of the common waveguide 132. The guided portion then propagates through the device waveguide 136 to the remaining portion of the optical device 100. It should be understood that the foregoing description is for illustrative purposes and not restrictive. The embodiments described above (and / or aspects thereof) can for example be used by combining them. Many modifications may further be made to adapt a particular situation or material to the requirements of the invention without departing from its scope. The dimensions, the types of materials, the orientations of the various components, as well as the number and position of the various components as described herein are intended to define the parameters of certain embodiments, and are in no way limiting, serving only examples of embodiments. Many other embodiments and modifications included in the spirit and scope of the claims will be apparent to those skilled in the art when reviewing the foregoing description. The scope of the invention should therefore be determined with reference to the appended claims, as well as to the full scope of equivalents covered by such claims. As used in the description, the phrase "in an exemplary embodiment" and other similar sentences mean that the described embodiment is only an example. The sentence is not intended to limit the inventive content of this embodiment. Other embodiments of the inventive content may not include the feature or structure described. In the appended claims, the terms "including" and "where" are used as their common French equivalent of the terms "comprising" and "in which". In addition, in the following claims, the terms "first", "second", "third", etc. are used only as markers and are not intended to impose numerical requirements on the corresponding objects.
    权利要求:
    Claims (20)
    [0001]
    REVENDICATIONS1. A light coupling structure (106) comprising: a diffraction grating coupler (112) configured to optically couple to an optical element (102), the diffraction grating coupler (112) having a diffraction grating (126) which extends parallel to a diffraction grating plane (122), the diffraction grating coupler (112) being configured to diffract a light beam into first and second diffracted portions (202, 204) when the light beam is directed from the optical element (102) to the diffraction grating coupler (112) and is actually normal to the plane of the diffraction grating (122), the first and second diffracted portions (202, 204) propagating away from the diffraction grating (122). one of the other; first and second intermediate waveguides (114,116) optically coupled to the diffraction grating coupler (112) and configured to respectively receive the first and second diffracted portions (202,204) from the diffraction grating coupler (112); ); and a common waveguide (132) coupled to the first and second intermediate waveguides (114, 116) at a junction of the waveguide (130), wherein the first and second diffracted portions (202, 204) propagating respectively in the first and second intermediate waveguides (114, 116) are combined in phase at the junction of the waveguide (130).
    [0002]
    A light coupling structure according to claim 1, wherein the light beam is indeed normal to the plane of the diffraction grating (122) when the angle between the light beam and the normal to the plane of the diffraction grating (122) does not does not exceed about 5.0 °.
    [0003]
    The light coupling structure according to claim 1, wherein the first and second intermediate waveguides (114, 116) are formed from a waveguide layer (172), the guide layer of the waveguide waveform (172) also forming a light coupling portion (146) extending along the diffraction grating (126), the diffraction grating (126) being configured to direct the first and second diffracted portions (202, 204) in the light coupling portion (146), the first and second diffracted portions (202, 204) propagating in opposite directions in the light coupling portion (146).
    [0004]
    The light coupling structure according to claim 3, wherein the diffraction grating coupler (112) comprises a coating layer (171) extending along the waveguide layer (172), the a diffraction grating (126) being integrated in the coating layer (171) such that a portion of the coating layer (171) extends between the diffraction grating (126) and the waveguide layer (172).
    [0005]
    A light coupling structure according to claim 3, wherein the diffraction grating (126) is separated from the waveguide layer (172) by a coating underlayer (176).
    [0006]
    The light coupling structure of claim 1, wherein the diffraction grating (126) has a diffraction grating period (192) that is less than a wavelength of the light beam.
    [0007]
    The light coupling structure of claim 1, wherein the diffraction grating (126) has a diffraction grating period (192) that is less than 1000 nanometers.
    [0008]
    The light coupling structure according to claim 1, wherein the first and second intermediate waveguides (114, 116) have equal path lengths between the diffraction grating coupler (112) and the guideway junction. wave (130).
    [0009]
    The light coupling structure according to claim 1, wherein the diffraction grating coupler (112), the first and second intermediate waveguides (114, 116) and the common waveguide (132) are formed. via at least one of a Silicon On Insulator (SOI) type silicon-on-insulator process, and a Complementary Metal Oxide Semiconductor (CMOS) semiconductor type process.
    [0010]
    The light coupling structure according to claim 1, further comprising a device waveguide (136) having a reciprocating portion (210) which is -Specifically coupled to the common waveguide (132).
    [0011]
    The light coupling structure of claim 1, wherein the junction of the waveguide (130) is a Y-junction.
    [0012]
    The light coupling structure according to claim 1, wherein the first and second intermediate waveguides (114, 116) respectively comprise first and second conical segments (154, 156) which respectively receive the first and second diffracted portions. (202, 204), the first and second conical segments (154, 156) being reduced in size as the first and second conical segments (154, 156) extend away from the diffraction grating coupler (112).
    [0013]
    An optical device (100) comprising: a diffraction grating coupler (112) configured to optically couple to an optical element (102), the diffraction grating coupler (112) having a diffraction grating (126) which is extends parallel to a diffraction grating plane (122), the diffraction grating coupler (112) being configured to diffract a light beam into first and second diffracted portions (202, 204) when the light beam is directed from the optical element (102) to the diffraction grating coupler (112) and is indeed normal to the plane of the diffraction grating (122), the first and second diffracted portions (202, 204) propagating away from one another the other ; first and second intermediate waveguides (114,116) optically coupled to the diffraction grating coupler (112) and configured to respectively receive the first and second diffracted portions (202,204) from the diffraction grating coupler (112); ); a common waveguide (132) coupled to the first and second intermediate waveguides (114, 116) at a junction of the waveguide (130), wherein the first and second diffracted portions (202, 204) are propagating respectively in the first and second intermediate waveguides (114, 116) are phase combined at the junction of the waveguide (130) to form a guided portion; and an optical circuit (108) which is optically coupled to the common waveguide (132), the optical circuit (108) being configured to process the guided ertion in a designated manner.
    [0014]
    An optical device according to claim 13, wherein the light beam is indeed normal to the plane of the diffraction grating (122) when the angle between the light beam and the normal to the plane of the diffraction grating (122) does not exceed about 6.0 °.
    [0015]
    The optical device according to claim 13, wherein the first and second intermediate waveguides (114, 116) are formed from a waveguide layer (172), the waveguide layer ( 172) also forming a light coupling portion (146) extending along the diffraction grating (126), the diffraction grating (126) being configured to direct the first and second diffracted portions (202, 204) in the light coupling portion (146), the first and second diffracted portions (202, 204) propagating in opposite directions in the light coupling portion (146).
    [0016]
    An optical device according to claim 15, wherein the diffraction grating coupler (112) comprises a coating layer (171) extending along the waveguide layer (172), the diffraction grating (126) being integrated in the coating layer (171) such that a portion of the coating layer (171) extends between the diffraction grating (126) and the waveguide layer (172) .
    [0017]
    An optical device according to claim 15, wherein the diffraction grating (126) is separated from the waveguide layer (172) by a coating underlayer (176).
    [0018]
    The optical device of claim 13, wherein the optical circuit (108) comprises a modulator.
    [0019]
    The optical device of claim 13, wherein the first and second intermediate waveguides (114, 116) have symmetrical paths between the diffraction grating coupler (112) and the waveguide junction (130). .
    [0020]
    The optical device of claim 13, wherein the optical device (100) is a photonic integrated circuit.
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    同族专利:
    公开号 | 公开日
    US20160116680A1|2016-04-28|
    CN105676369A|2016-06-15|
    SG10201508729PA|2016-05-30|
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    法律状态:
    2016-10-25| PLFP| Fee payment|Year of fee payment: 2 |
    2017-10-13| PLSC| Search report ready|Effective date: 20171013 |
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    优先权:
    申请号 | 申请日 | 专利标题
    US14/523,349|US20160116680A1|2014-10-24|2014-10-24|Light coupling structure and optical device including a grating coupler|
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